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Vacuume Coating Machine

Vacuume Coating Machine

Product name:Vacuume Coating Machine

Item:BT

Details:

Application:
For coating optics elements.

Technical Data:
Model
BT600
BT700
BT800
BT900
BT1100
vacuum chamber
(diameter×height)
Ø600×750
Ø710×850
Ø800×900
Ø900×1000
Ø1100×1300
Ultimate vacuum degree
≤3.0×10-4Pa
Time for vacuum recovery
4.0×10-3Pa≤15min

Pumping
system
Diffusion pump
K-400
TK-500
K-600
K-630
TK-500×2
Roots pump
 
 
 
ZJP-150
ZJP-300
Mechanical pump
2X-30
2X-70
2X-70
2X-70
2X-70
Vacuum measuring system
Three-way digital compound vacuum gauge, two ways of
 low vacuum and one of high vacuum
Operation mode
Manual/automatic
Work piece holder
Ø600
Ø640
Ø750
Ø840
Ø1040
Work piece baking system
Up baking; heated by sheathed tubular heating
element; maximum temperature 350℃; PID automatic temperature
control and display.

Evaporation source
Resistance evaporation source
Power of the resistance evaporation source: 4KW (8V, 600A)
Electron beam evaporation source
Power of E-type electron beam evaporation source: 6-10KW
Monitoring system on depth of films
The optical film thickness monitor, a wavelength range of 380-800nm, 9otransflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6
Charge systems
Automatic pressure instrument
Mass flow meter: one way one display, dual way dual display
Ion-assisted (optional)
H6 Hall ion source, H10 Hall ion source, Ø12cm Kaufman ion source, Ø16cm Kaufman ion source
Cryogenic trap (optional)
Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670
Power demand
Cooling water

Pressure and temperature
Pressure: 0.25-0.35MPa; temperature ≤25℃
Flow rate
≥50L/min
≥60L/min
≥80L/min
≥100L/min
≥140L/min
Compressed air
Pressure: 0.5-0.7MPa
Maximum power consumption
25KW
35KW
40KW
45KW
50KW
Overall dimension (width×depth×height)
2100×1800×2000
3350×2600×2370
3580×3000×2450
3870×3600×2670
3870×3600×2670

Gross weight (Kg)
About 1500
About 2000
About 2500
About 3000
About 3000
 
 



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